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Summary of Silicon Etching at SNF

This table summarizes Si etch capabilities at SNF.

Wet Etching of Si at SNF

Wet Bench
Etchant
Approximate
Etch Rate
Wbflexcorr-1 and -2 KOH 1um/min
Wbflexcorr-1 and -2
TMAH
 1.2um/min
     

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