Skip to content. | Skip to navigation

Sections
Personal tools
You are here: Home / Process / Process Modules / Etching / Wet Etching / Silicon Nitride Wet Etching and Stripping

Silicon Nitride Wet Etching and Stripping

This folder contains process modules concerning the etching and stripping of silicon nitride for all levels of contamination.
Standard Nitride Strip, clean
This module describes nitride stripping at wbnitride.
Non-Standard Nitride Strip, contaminated
This process module covers the stripping of nitride at wbflexcorr-3and-4 or wbflexcorr-1and-2.

Document Actions