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Runsheets for Etch Qualification Test Wafers

This folder contains runsheets for the creation of test wafers for etch and other process qualifications. Some of these runsheets include photolithography steps and are common to several etch tools.
Guide to Wafer Production for Etch Tool and Process Qualification Wafers
This page maps out what thin films and masks are needed for the testing of etchers and etch processes. It also lists which test results are required for qualification. Links are provided to specific runsheets used to create the wafers.
Runsheet for 100nm Thermal Oxidation Test Wafers
This page describes the step needed to create 100nm thermal oxide wafers used in the qualification and characterization of etch processes.
Runsheet for 1um LTO Test Wafers
This page describes the step needed to create 1um thermal oxide wafers used in the qualification and characterization of etch processes.

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