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nano@stanford Training and Educational Materials

 

We are currently developing new training instructions and material in the Stanford Lagunita Online Courses.  The course for tool and processing training is entitled:  nano@stanford.  It will cover tools in both SNF and SNSF.

While we will keep the SNF Labmember Wiki pages for a large amount of content regarding the tools and processing in SNF, the new Lagunita Course will be used specifically for the training and background educational material.  It will include information for tool training and qualification, and also for common processing procedures used in the cleanroom.

Unlike most of the Lagunita Online Courses which require the users to register as a Lagunita student and then register and login for each course, nano@stanford is an open-access course which allows anyone to access any page or all of the course directly without any registration or login, and any page can be directly accessed by a simple link. 

For each tool that is currently included in the course, there is background material (using text, images, diagrams, and videos, including videos of mini-lectures given by resident experts).  We strongly encourage you to view that material.   In fact, to qualify to use any tool, viewing the background material for that section is required.    Also included are the steps required to become a qualified user of the tool, and general tool-use information.   

For tools that are not yet included in the new Lagunita course, please refer to the SNF wiki equipment section for those tools, or the SNSF web pages for their tools.

The section on common cleanroom processing procedures, including topics such as wafer handling and wafer cleaving, are not explicitly required for cleanroom use, but should be especially useful for new labmembers. 

 

To access the nano@stanford course, first go to the Home Page: 

https://lagunita.stanford.edu/courses/course-v1:Engineering+NanoFab01+Ongoing/info

Note:  you can disregard the “Register to save your course progress” and “Sign In” buttons at the top.  (You can register if you want, but if you do you will have to sign in on any subsequent time you visit the course pages.  And there is no “course progress” that we keep track of anyway.) 

Next click on the “Course” link at the top left, next to the Home link.  Down along the left side the different sections and subsections will be listed, and these can be clicked to go to those parts of the course.

The first time in the course, click on “Introduction to nano@stanford” section. The four introductory subsections will then be listed, if they aren’t already visible.

Next click on “1. Platform walkthrough,”  followed by clicking on the green “Begin Walkthrough” button.   Then by clicking on the Next, Back, and Skip buttons, you will be taken through a very short demo on how to use and navigate the tabs and course sections and subsections.   Click on skip, or done, to exit the Walkthrough.

Next click on the next three introductory subsections (“2. What Are These Materials and For Whom Are They Intended”;  “3. How These Materials areOrganized”; and 4. How to Use These Materials.”) and learn more about the material in the course and its use for Labmembers.

 

For those doing the Dry Etching / PT-MTL tool section, click on “Dry Etching” at the left in any page of the course. Then click through and read all the subsections, starting with “1. Introduction to the Dry Etching Section.” 

The Dry Etching Section contains the following subsections:
1. Introduction to the Dry Etching Section
2. Introduction to Dry Etching, and Basics of Plasmas and Types of Dry Etching Tools (Video lectures by Dr. Jim McVittie, SNF)
3. Dry Etching Mechanisms and Choosing a Dry Etching Process and Tool  (Video lectures by Dr. Jim McVittie, SNF)
4. Choosing a Dry Etch Tool and Process at SNF
5a. Plasma-Therm Metal Dry Etcher (which includes all the information needed to get trained and qualified on this tool) (includes video)

 

For those wishing to view the Substrates and Wafer Handling section, click on “Substrates and Wafer Handling” at the left in any page of the course. Then click through and read the subsections of interest.

The Substrates and Wafer Handling Section contains the following subsections:
1. Introduction to the Substrates and Wafer Handling Section
2. Substrates
3. Crystallography and Wafer Orientations
4. Wafer Handling using Tweezers, Vacuum Wands and Cassettes (Video)
5. Handling Non-Standard Substrates and Wafer Pieces (Video)
6. Cleaving (Video)
7. Next Steps

 

Finally, we greatly appreciate any feedback and comments regarding these materials, so we ask you to fill out the brief Qualtrics Survey linked at the bottom of the course (the “SNF/SNSF Feedback Survey”) after you have viewed any of the material.    [Note: the separate Pre- and Post-Course Surveys, produced by the Lagunita staff and linked to on separate pages of the course, are optional.  But the “SNF/SNSF Feedback Survey” is important to us and we ask that you fill that out completely.]  Thanks!

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